Title:
Peripheral exposure device and peripheral exposure method
Document Type and Number:
Japanese Patent JP6346795
Kind Code:
B2
Inventors:
Tomohiro Matsuo
Shigehiro Goto
Kubo Yasunori
Liu Ice Shio
Shigehiro Goto
Kubo Yasunori
Liu Ice Shio
Application Number:
JP2014117700A
Publication Date:
June 20, 2018
Filing Date:
June 06, 2014
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/027; G11B5/84; G11B7/26
Domestic Patent References:
| JP3108316A | ||||
| JP2002141264A | ||||
| JP3108315A | ||||
| JP4072614A | ||||
| JP2073621A | ||||
| JP2114628A | ||||
| JP8321463A | ||||
| JP2012114191A | ||||
| JP2011238798A |
Attorney, Agent or Firm:
Tsutomu Sugiya
Hiroyuki Todaka
Tomohiko Sugitani
Kurihara Kaname
Hiroyuki Todaka
Tomohiko Sugitani
Kurihara Kaname
Previous Patent: A discharge sheet loading device, an image reader, and an image forming device
Next Patent: FLOAT BOWL FOR CARBURETOR
Next Patent: FLOAT BOWL FOR CARBURETOR