Title:
光電子増倍管及びその製造方法
Document Type and Number:
Japanese Patent JP5000137
Kind Code:
B2
Abstract:
The present invention relates to a photomultiplier having a structure for making it possible to easily realize high detection accuracy and fine processing, and a method of manufacturing the same. The photomultiplier comprises an enclosure having an inside kept in a vacuum state, whereas a photocathode emitting electrons in response to incident light, an electron multiplier section multiplying in a cascading manner the electron emitted from the photocathode, and an anode for taking out a secondary electron generated in the electron multiplier section are arranged in the enclosure. A part of the enclosure is constructed by a glass substrate having a flat part, whereas each of the electron multiplier section and anode is two-dimensionally arranged on the flat part in the glass substrate.
Inventors:
Hiroyuki Hisashima
Hideki Shimoi
Akihiro Kageyama
Keisuke Inoue
Masuho Ito
Hideki Shimoi
Akihiro Kageyama
Keisuke Inoue
Masuho Ito
Application Number:
JP2005518022A
Publication Date:
August 15, 2012
Filing Date:
February 16, 2005
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
H01J43/26; H01J40/06; H01J43/12; H01J43/24; H01J43/28
Domestic Patent References:
JP2000040487A | 2000-02-08 |
Foreign References:
US3225239A | 1965-12-21 | |||
US5568013A | 1996-10-22 | |||
US3244922A | 1966-04-05 | |||
GB503211A | 1939-04-03 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Shiro Terasaki
Satoru Ishida
Shiro Terasaki
Satoru Ishida