Title:
カルボン酸化合物、塩基発生剤及び当該塩基発生剤を含有する感光性樹脂組成物
Document Type and Number:
Japanese Patent JP5765851
Kind Code:
B2
Inventors:
Koji Arimitsu
Application Number:
JP2011196094A
Publication Date:
August 19, 2015
Filing Date:
September 08, 2011
Export Citation:
Assignee:
Tokyo University of Science
International Classes:
C07C63/64; C07D487/04; C07D487/08; C09K3/00; G03F7/004; H01L21/027
Domestic Patent References:
| JP5032638A | ||||
| JP2011080032A | ||||
| JP2010084144A | ||||
| JP2009280785A | ||||
| JP2007101685A | ||||
| JP2005264156A |
Foreign References:
| WO2009122664A1 |
Other References:
Synthesis,2007年,(21),p.3333-3338
Journal of Medicinal Chemistry,1979年,22(7),p.845-849
Journal fuer Praktische Chemie,1930年,127,p.169-188
Journal of Medicinal Chemistry,1979年,22(7),p.845-849
Journal fuer Praktische Chemie,1930年,127,p.169-188
Attorney, Agent or Firm:
Masanori Hata
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