Title:
感光性樹脂組成物、これを用いた感光性樹脂フィルム、並びにこれらを用いた電子部品
Document Type and Number:
Japanese Patent JP5887867
Kind Code:
B2
Inventors:
Kato Sadaaki
Shu Hashimoto
Shu Hashimoto
Application Number:
JP2011255441A
Publication Date:
March 16, 2016
Filing Date:
November 22, 2011
Export Citation:
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
G03F7/027; C08F22/22; G03F7/004
Domestic Patent References:
| JP2009020191A | ||||
| JP2011174014A | ||||
| JP2010224067A | ||||
| JP2008051918A | ||||
| JP2011013602A | ||||
| JP2000227656A |
Attorney, Agent or Firm:
Tamotsu Otani
Kenichi Hirasawa
Toshihide Ishihara
Kenichi Hirasawa
Toshihide Ishihara