Title:
感光性樹脂組成物、その積層体、その硬化物及び該組成物を用いたパターン形成方法
Document Type and Number:
Japanese Patent JP4789733
Kind Code:
B2
Inventors:
Sadayuki Ono
Moriakira
Moriakira
Application Number:
JP2006199938A
Publication Date:
October 12, 2011
Filing Date:
July 21, 2006
Export Citation:
Assignee:
NIPPON KAYAKU KABUSHIKI KAISHA
Microchem Corporation
Microchem Corporation
International Classes:
G03F7/004; C08G59/68; G03F7/038; H01L21/027; H05K3/00
Domestic Patent References:
| JP10097068A | ||||
| JP63071840A |
Foreign References:
| WO2005116038A1 |
Attorney, Agent or Firm:
Hideto Asamura
Hajime Asamura
Katsunori Ando
Hajime Asamura
Katsunori Ando