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Title:
A physical state measuring apparatus and a physical status measuring method
Document Type and Number:
Japanese Patent JP5934819
Kind Code:
B2
More Like This:
WO/2015/080863ADJUSTMENT OF POLISHING RATES DURING SUBSTRATE POLISHING WITH PREDICTIVE FILTERS
JPH05136254ELECTROSTATIC ATTRACTING APPARATUS
Inventors:
Jun Yamabuki
Koshimizu ground salt
Tatsuo Matsudo
Kenji Nagai
Application Number:
JP2015042688A
Publication Date:
June 15, 2016
Filing Date:
March 04, 2015
Export Citation:
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Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/66; G01K5/52; G01K11/12
Domestic Patent References:
JP2006242570A
Attorney, Agent or Firm:
Patent Business Corporation Sakura International Patent Office



 
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