Title:
圧電薄膜共振子及びフィルタ
Document Type and Number:
Japanese Patent JP4024741
Kind Code:
B2
Abstract:
A piezoelectric thin-film resonator includes a substrate, a lower electrode arranged on the substrate, a piezoelectric film arranged on the lower electrode, and an upper electrode arranged on the piezoelectric film. A region in which the upper electrode overlaps with the lower electrode through the piezoelectric film has an elliptical shape, and a condition such that 1
Inventors:
Tokihiro Nishihara
Yokoyama Go
Takeshi Sakashita
Iwaki Takashi
Miyashita Tsutomu
Yokoyama Go
Takeshi Sakashita
Iwaki Takashi
Miyashita Tsutomu
Application Number:
JP2003360054A
Publication Date:
December 19, 2007
Filing Date:
October 20, 2003
Export Citation:
Assignee:
富士通メディアデバイス株式会社
富士通株式会社
富士通株式会社
International Classes:
H01L41/09; H03H9/17; H01L29/82; H01L41/08; H01L41/187; H03H9/13; H03H9/15; H03H9/54; H03H9/56; H03H9/58
Domestic Patent References:
| JP2003273693A | ||||
| JP2003133892A | ||||
| JP2003204239A | ||||
| JP62076913A |
Attorney, Agent or Firm:
Shuhei Katayama