Title:
圧電振動デバイス
Document Type and Number:
Japanese Patent JP7188454
Kind Code:
B2
Abstract:
In a piezoelectric resonator device according to one or more embodiments, an internal space for hermetically sealing a vibrating part including a first excitation electrode and a second excitation electrode of a crystal resonator plate is formed by bonding a first sealing member and a second sealing member respectively to the crystal resonator plate. A through hole is formed in the second sealing member. A through electrode is formed along an inner wall surface of the through hole to establish conduction between an electrode formed on a first main surface and an external electrode terminal formed on a second main surface. A corrosion resistance structure to solder is formed on the through electrode that establishes conduction between the electrode and the external electrode terminal with a conductive metal other than Au.
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Inventors:
Satoru Ishino
Hiroki Yoshioka
Hiroki Fujiwara
Hiroki Yoshioka
Hiroki Fujiwara
Application Number:
JP2020563180A
Publication Date:
December 13, 2022
Filing Date:
December 19, 2019
Export Citation:
Assignee:
Great Vacuum Co., Ltd.
International Classes:
H03H9/02
Domestic Patent References:
| JP2018142888A | ||||
| JP2015106638A | ||||
| JP2013051510A | ||||
| JP2004214787A | ||||
| JP2014143600A | ||||
| JP11026628A | ||||
| JP2013162295A |
Foreign References:
| WO2018051800A1 | ||||
| WO2010016487A1 |
Attorney, Agent or Firm:
Patent Attorney Corporation ARK Office