Title:
A pilot pressure adjustment device, a servovalve, and an actuator
Document Type and Number:
Japanese Patent JP6278558
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce damage to a piezoelectric element and improve reliability.SOLUTION: A pilot pressure regulator comprises: a piezoelectric unit 6 including stacked piezoelectric elements in a casing and capable of stroking an end member 16 in a stack direction in which the piezoelectric elements are stacked; a pressure member 11 pressed by the end member 16 to be stroked in the stack direction along with the end member 16; a holder 13 accommodating therein the piezoelectric unit 6 and holding the casing 15 at least from an outer circumference side; and a nozzle 12 forming a channel between the nozzle 12 and an end portion 16a of the pressure member 11 opposite to the end member 16 for circulating a working fluid therein, the holder 13 including a first inner circumferential surface 28 forming a first gap G1 between the first inner circumferential surface 28 and an outer circumferential surface 15a of the casing 15, and second inner circumferential surfaces 29 arranged on both sides of the first inner circumferential surface 28 in the stack direction and forming second gaps G2 smaller than the first gap G1, respectively.
Inventors:
Hisaya Makoto
Tsuruya Minobu
Tsuneo Kobayashi
Mitsuya Uchida
Tsuruya Minobu
Tsuneo Kobayashi
Mitsuya Uchida
Application Number:
JP2014036189A
Publication Date:
February 14, 2018
Filing Date:
February 27, 2014
Export Citation:
Assignee:
Mitsubishi Heavy Industries Machinery Systems Co., Ltd.
International Classes:
F16K31/02; F15B13/043; H01L41/053; H01L41/083; H01L41/09; H02N2/04
Domestic Patent References:
| JP6109158A | ||||
| JP63280981A | ||||
| JP64093680A | ||||
| JP2009138947A | ||||
| JP5232714B2 |
Foreign References:
| US20020148518 |
Attorney, Agent or Firm:
Ryuichiro Mori
Masatake Shiga
Tadashi Takahashi
Tetsuo Yamazaki
Yasushi Matsunuma
Masatake Shiga
Tadashi Takahashi
Tetsuo Yamazaki
Yasushi Matsunuma