Title:
ポンプの機械式ピストンのピストン制御システムおよび方法
Document Type and Number:
Japanese Patent JP5674853
Kind Code:
B2
Abstract:
Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a singie-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.
Inventors:
ゴネラ， ジョージ
セドロン， ジェームス
ガシュゲー， イラジ
セドロン， ジェームス
ガシュゲー， イラジ
Application Number:
JP2013086392A
Publication Date:
February 25, 2015
Filing Date:
April 17, 2013
Export Citation:
Assignee:
インテグリス・インコーポレーテッド
International Classes:
F04B13/00; F04B43/02; F04B49/06; H01L21/027; H02P6/08
Attorney, Agent or Firm:
Yasuhiko Murayama
Masatake Shiga
Takashi Watanabe
Shinya Jitsuhiro
Masatake Shiga
Takashi Watanabe
Shinya Jitsuhiro