Title:
【発明の名称】カラ―固体撮像素子の製造方法
Document Type and Number:
Japanese Patent JP2535980
Kind Code:
B2
Abstract:
PURPOSE:To easily and accurately confirm variation in the shape of a coloring matter pattern for a color filter with time by forming a mark for correcting value confirmation which is made of the same coloring matter separately from the coloring matter pattern for the color filter simultaneously with the coloring matter pattern for the color filter. CONSTITUTION:At part of a chip which does not affect the function of the color solid-state image pickup element, 1st patterns 3a-3c which are as wide as or nearly as wide as the coloring matter pattern are formed in combination with a metallic layer 2 according to the number of coloring matters, and 2nd patterns 5a-5b which are made of respective coloring matters which have the same or nearly the same width (a) with the coloring matter pattern for the color filter are formed on the pattern consisting of the metallic layer 2 simultaneously with the formation of the coloring matter pattern for the color filter and utilizes as the correcting value confirmation of the coloring matter pattern size of the color filter. Consequently, variation in the thickness of the shape of the coloring matter pattern for the color filter is accurately read.
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Inventors:
TANI MIZUHITO
YAGUCHI ITSUO
YAMAMOTO KATSUMI
ITO SHINJI
YAGUCHI ITSUO
YAMAMOTO KATSUMI
ITO SHINJI
Application Number:
JP29863587A
Publication Date:
September 18, 1996
Filing Date:
November 26, 1987
Export Citation:
Assignee:
TOPPAN PRINTING CO LTD
International Classes:
G02B5/20; H01L27/14; H04N9/07; (IPC1-7): G02B5/20; H01L27/14; H04N9/07
Attorney, Agent or Firm:
Takehiko Suzue (3 outside)