Title:
ピストン
Document Type and Number:
Japanese Patent JP5733994
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a piston capable of improving a durability life of a seal member, and to provide a vacuum pump provided with the piston.SOLUTION: The piston 5 includes a piston body 51, the seal member 52, a seal member fixing sheet 53 and a clamping portion 54. The piston body 51 is inserted into a cylinder 6 so as to allow stroking and has a first surface 51a perpendicular to the stroking direction. The seal member 52 is attached to the first surface 51a and performs the sealing between the cylinder 6 and the piston body 51. The seal member fixing sheet 53 has a second surface 53a which faces the first surface 51a and comes into contact with the seal member 52 and a third surface 53b of the opposite side to the second surface 53a. The second surface 53a has a first region A1 of the center side and a second region A2 of the circumferential side, the first region A1 presses the seal member 52 with a first pressing force and the second region A2 presses the seal member 52 with a second pressing force larger than the first pressing force.
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Inventors:
Ryuji Itoyama
Motoyasu Nagano
Hiroaki Koga
Makinose Yasuhiro
Motoyasu Nagano
Hiroaki Koga
Makinose Yasuhiro
Application Number:
JP2011010084A
Publication Date:
June 10, 2015
Filing Date:
January 20, 2011
Export Citation:
Assignee:
ULVAC Kiko Co., Ltd.
International Classes:
F04B39/00; F04B37/16
Domestic Patent References:
| JP10148178A | ||||
| JP2006322459A | ||||
| JP2008248813A |
Foreign References:
| CN101943152A |
Attorney, Agent or Firm:
Junichi Omori
Ori Akira
Ori Akira