Title:
A plasma processing method and a plasma treatment apparatus
Document Type and Number:
Japanese Patent JP6242288
Kind Code:
B2
Inventors:
Mihiro Shigehiro
Katohisashi Kato
Jun Sato
Toshiyuki Nakatsubo
Hiroyuki Kikuchi
Katohisashi Kato
Jun Sato
Toshiyuki Nakatsubo
Hiroyuki Kikuchi
Application Number:
JP2014101683A
Publication Date:
December 06, 2017
Filing Date:
May 15, 2014
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/316; C23C16/455; C23C16/52; H01L21/31; H01L21/318; H05H1/46
Domestic Patent References:
| JP2005175242A | ||||
| JP2012253313A | ||||
| JP2014022458A | ||||
| JP2014520212A | ||||
| JP2001053065A | ||||
| JP2007173848A | ||||
| JP2004035971A |
Foreign References:
| WO2012176996A2 | ||||
| US20140224177 | ||||
| US20130149467 | ||||
| US20040082171 | ||||
| US20100311249 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito
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