Title:
A plasma treatment apparatus and a plasma processing method
Document Type and Number:
Japanese Patent JP5962922
Kind Code:
B2
Inventors:
Nishizaki Nobuhiro
Atsushi Harai
Atsushi Harai
Application Number:
JP2013108814A
Publication Date:
August 03, 2016
Filing Date:
May 23, 2013
Export Citation:
Assignee:
Panasonic IP Management Co., Ltd.
International Classes:
H01L21/3065; H01L21/677; H01L21/683; H05H1/46
Domestic Patent References:
| JP2012248741A | ||||
| JP2009094436A | ||||
| JP2007294812A | ||||
| JP4034928A |
Attorney, Agent or Firm:
Mitsuo Tanaka
Samejima Mutsumi
Yoshiyuki Maebori
Samejima Mutsumi
Yoshiyuki Maebori