Title:
研磨装置及び研磨方法
Document Type and Number:
Japanese Patent JP6498142
Kind Code:
B2
Inventors:
Kubota Yuki
Manabu Kondo
Manabu Kondo
Application Number:
JP2016055377A
Publication Date:
April 10, 2019
Filing Date:
March 18, 2016
Export Citation:
Assignee:
Mitsubishi Hitachi Power Systems Co., Ltd.
International Classes:
B24B41/04; B24B27/00
Domestic Patent References:
| JP2015112666A | ||||
| JP62233309A | ||||
| JP2001049604A | ||||
| JP6285763A | ||||
| JP59037049A |
Foreign References:
| US20040092213 |
Attorney, Agent or Firm:
Seishin ip patent business corporation