Title:
A polish device provided with the pressure controller and the pressure controller
Document Type and Number:
Japanese Patent JP6085572
Kind Code:
B2
Abstract:
A pressure regulator capable of improving both stability of pressure and responsiveness to an input signal is disclosed. A PID controller is configured to stop producing a corrective command value from a point in time when a pressure command value has changed until a PID control starting point and to produce the corrective command value after the PID control starting point. A regulator controller is configured to control operation of a pressure regulation valve so as to eliminate a difference between the pressure command value and a first pressure value from the point in time when the pressure command value has changed until the PID control starting point, and to control the operation of the pressure regulation valve so as to eliminate a difference between the corrective command value and the first pressure value after the PID control starting point.
Inventors:
Nobuyuki Takahashi
Toru Maruyama
Sakukawa Takashi
Toru Maruyama
Sakukawa Takashi
Application Number:
JP2014002526A
Publication Date:
February 22, 2017
Filing Date:
January 09, 2014
Export Citation:
Assignee:
Ebara Corporation
International Classes:
B24B37/005; B24B49/16; G05D16/20; H01L21/304
Domestic Patent References:
| JP2014021881A | ||||
| JP7009327A | ||||
| JP2008137103A | ||||
| JP2011041996A |
Attorney, Agent or Firm:
Isamu Watanabe
Tetsuya Hirosawa
Tetsuya Hirosawa