A polish device temperature control system and a polish device

Title:

A polish device temperature control system and a polish device

Document Type and Number:

Japanese Patent JP6030980

Kind Code:

B2

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Inventors:

Fujihiko Toyomasu
Toru Maruyama
Yasuyuki Honjima

Application Number:

JP2013063623A

Publication Date:

November 24, 2016

Filing Date:

March 26, 2013

Export Citation:

Assignee:

Ebara Corporation

International Classes:

B24B37/015; H01L21/304

Domestic Patent References:

Attorney, Agent or Firm:

Shinjiro Ono
Toru Miyamae
Yamazaki Kosaku
Yukio Kanegae
Koichi Kushida

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Next Patent: JPS6030981