Title:
A polish tool for efficient precision processing, and its process
Document Type and Number:
Japanese Patent JP5972032
Kind Code:
B2
Inventors:
Hiroshi Ishizuka
Application Number:
JP2012104966A
Publication Date:
August 17, 2016
Filing Date:
May 01, 2012
Export Citation:
Assignee:
New Technology Development Co., Ltd.
International Classes:
B24D3/02; B24B37/00; B24B53/12; B24D3/00; H01L21/304
Domestic Patent References:
| JP2008114334A | ||||
| JP2006075922A | ||||
| JP2005177979A |
Foreign References:
| WO1991010538A1 | ||||
| US20080053000 |
Attorney, Agent or Firm:
Kiyoji Kuzuwa
Susumu Shiozaki
Susumu Shiozaki