Title:
サファイア基板の研磨工具
Document Type and Number:
Japanese Patent JP5592117
Kind Code:
B2
Inventors:
Fuwa Tokuhito
Application Number:
JP2010022767A
Publication Date:
September 17, 2014
Filing Date:
February 04, 2010
Export Citation:
Assignee:
Incorporated company disco
International Classes:
B24D3/22; B24B37/24; B24D3/00
Attorney, Agent or Firm:
Ono Pure in addition
Sachiko Okunuki
Sachiko Okunuki