Title:
研磨装置
Document Type and Number:
Japanese Patent JP7398946
Kind Code:
B2
Abstract:
To provide a polishing device which can recover a larger amount of powder dust (polishing waste) accumulating around a dress part.SOLUTION: A polishing device 1 includes: a chuck table 13; a polishing mechanism 2 having a polishing tool 23, a spindle shaft, and a vertical moving mechanism 21; a dress part 3 in which an upper end of a tool body contacts with a polishing surface of the polishing tool 23 to dress the polishing surface; a dress part moving unit which supports the dress part 3 in a manner that the dress part 3 can move to a first position P1 located outside a processing chamber 5 and a third position P3 which is located inside the processing chamber 5 and at which the dress part 3 contacts with the polishing surface; a duct 610 for the processing chamber connected to the processing chamber 5; and a duct 620 for the dress part which is installed at the first position P1 (a stand-by position) and suctions dust accumulating around the dress part 3 which returns to the first position P1 after dressing of the polishing surface.SELECTED DRAWING: Figure 1
Inventors:
Masafumi Menmoto
Application Number:
JP2019226712A
Publication Date:
December 15, 2023
Filing Date:
December 16, 2019
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B55/06; B24B7/04; B24B53/02; B24B53/12; H01L21/304
Domestic Patent References:
| JP2003305643A | ||||
| JP2000117632A |
Attorney, Agent or Firm:
Sakai International Patent Office
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