Title:
研磨パッドおよびその製造方法
Document Type and Number:
Japanese Patent JP5456278
Kind Code:
B2
Inventors:
Fumio Miyazawa
Mitsunori Itoyama
Mitsunori Itoyama
Application Number:
JP2008168661A
Publication Date:
March 26, 2014
Filing Date:
June 27, 2008
Export Citation:
Assignee:
Fujibo Holdings Co., Ltd.
International Classes:
B24B37/24; B24B37/11; B24B37/20; B24B37/26; C08J5/14
Domestic Patent References:
| JP2002158197A | ||||
| JP6114742A | ||||
| JP2007197235A |
Attorney, Agent or Firm:
Toshiaki Igarashi