Title:
A polymerization method of polymer
Document Type and Number:
Japanese Patent JP6260527
Kind Code:
B2
Inventors:
Jun Hatakeyama
Akiyuki Funatsu
Adachi Teppei
Akiyuki Funatsu
Adachi Teppei
Application Number:
JP2014249712A
Publication Date:
January 17, 2018
Filing Date:
December 10, 2014
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
C08F2/48; C08F20/38; G03F7/004; G03F7/038; G03F7/039
Domestic Patent References:
| JP2011168698A | ||||
| JP2011039266A | ||||
| JP2008133448A | ||||
| JP2006178317A | ||||
| JP2013080685A | ||||
| JP2016108508A |
Foreign References:
| US20080102407 |
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Katsuhiko Masaki
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Katsuhiko Masaki