Title:
A positioning device, an exposure device, and a device manufacturing method
Document Type and Number:
Japanese Patent JP5943557
Kind Code:
B2
Inventors:
Toshiya Asano
Application Number:
JP2011123584A
Publication Date:
July 05, 2016
Filing Date:
June 01, 2011
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/20; G05D3/00; G05D3/12
Domestic Patent References:
| JP5250041A | ||||
| JP2004162745A | ||||
| JP2009164282A | ||||
| JP2003343559A | ||||
| JP2002313716A | ||||
| JP2001230177A | ||||
| JP2004164029A |
Foreign References:
| US6504162 |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu