Title:
ポジ型感光性組成物、該ポジ型感光性組成物に使用される高分子化合物、該高分子化合物の製造方法、該高分子化合物の製造に使用される化合物及びそのポジ型感光性組成物を用いたパターン形成方法
Document Type and Number:
Japanese Patent JP5183133
Kind Code:
B2
Inventors:
Akinori Shibuya
Takayuki Kato
Takayuki Kato
Application Number:
JP2007242070A
Publication Date:
April 17, 2013
Filing Date:
September 19, 2007
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/039; C08F2/38; H01L21/027
Domestic Patent References:
| JP2006091664A | ||||
| JP2003140350A | ||||
| JP2007308586A | ||||
| JP2005272772A | ||||
| JP2000001469A | ||||
| JP2008127461A |
Attorney, Agent or Firm:
Takeshi Takamatsu
Toshiyuki Ozawa
Hasegawa Hiromichi
Toshiyuki Ozawa
Hasegawa Hiromichi