Title:
ポジ型レジスト組成物およびレジストパターン形成方法
Document Type and Number:
Japanese Patent JP4409366
Kind Code:
B2
Inventors:
Takeshita Yu
Shogo Matsumaru
Ryotaro Hayashi
Hideo Haneda
Takeshi Iwai
Shogo Matsumaru
Ryotaro Hayashi
Hideo Haneda
Takeshi Iwai
Application Number:
JP2004169590A
Publication Date:
February 03, 2010
Filing Date:
June 08, 2004
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/039; C08F232/00; H01L21/027
Domestic Patent References:
| JP2003345025A | ||||
| JP2004133055A | ||||
| JP2003066626A | ||||
| JP2003167347A | ||||
| JP2000235263A | ||||
| JP2003335826A | ||||
| JP2004176449A | ||||
| JP2004182298A | ||||
| JP2005298517A | ||||
| JP2005316136A |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Masakazu Aoyama
Suzuki Mitsuyoshi
Noriko Yanai
Masatake Shiga
Masakazu Aoyama
Suzuki Mitsuyoshi
Noriko Yanai