Title:
ポジ型感光性組成物及びそれを用いたパターン形成方法
Document Type and Number:
Japanese Patent JP5039424
Kind Code:
B2
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Inventors:
Kunihiko Kodama
Application Number:
JP2007114490A
Publication Date:
October 03, 2012
Filing Date:
April 24, 2007
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/039; C08F20/12; C08F32/08; G03F7/004; H01L21/027
Domestic Patent References:
| JP2004525425A | ||||
| JP2006349940A | ||||
| JP2004302200A | ||||
| JP2006016379A | ||||
| JP2004035728A | ||||
| JP2001233827A | ||||
| JP49034532A |
Attorney, Agent or Firm:
Takeshi Takamatsu
Toshiyuki Ozawa
Kimura Shinya
Toshiyuki Ozawa
Kimura Shinya