Title:
A posture detector, a contact probe, and a multi-sensing probe
Document Type and Number:
Japanese Patent JP5936357
Kind Code:
B2
Abstract:
An image sensor for fringe images of interference fringes and the like in which the optical system has a simpler configuration than that of the conventional line image sensor, and faster detection becomes possible includes a light receiving plane on which two or more straight rows of pixels (62) are disposed, and captures images of regular fringes generated from light reflected from an irradiated body (14,66) in accordance with the amount of light received by each pixel; among the rows of pixels, at least two rows of pixels are disposed at right angles to each other, and acquires images of linear fringes crossing almost at right angles in two directions among the fringe projected onto the light receiving plane.
Inventors:
Kazuhiko Hidaka
Nobuhiro Ishikawa
Nobuhiro Ishikawa
Application Number:
JP2012001412A
Publication Date:
June 22, 2016
Filing Date:
January 06, 2012
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01B9/02; G01B5/012; G01B11/25; G01B11/26
Domestic Patent References:
| JP2007101491A |
Foreign References:
| WO2005085749A1 |
Attorney, Agent or Firm:
Yuji Iwahashi
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