Title:
A power supply and a plasma production device for plasma production devices
Document Type and Number:
Japanese Patent JP6061288
Kind Code:
B2
Inventors:
Yoshihiko Uesugi
Tatsuo Ishijima
Yasunori Tanaka
Sumiishi Yujiro
Tatsuo Ishijima
Yasunori Tanaka
Sumiishi Yujiro
Application Number:
JP2012171342A
Publication Date:
January 18, 2017
Filing Date:
August 01, 2012
Export Citation:
Assignee:
Kanazawa University
International Classes:
H05H1/24; H03K3/57
Domestic Patent References:
| JP2004179143A | ||||
| JP2002093823A | ||||
| JP2069304A | ||||
| JP2007234461A | ||||
| JP2005038616A |
Foreign References:
| WO2012010374A1 | ||||
| WO1985004769A1 |
Attorney, Agent or Firm:
Hiromori Arai