Title:
圧力制御装置および真空システム
Document Type and Number:
Japanese Patent JP6424500
Kind Code:
B2
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Inventors:
Nobuyuki Hirata
Application Number:
JP2014143448A
Publication Date:
November 21, 2018
Filing Date:
July 11, 2014
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
H02P27/08; H02M7/48; H02P5/46; H02P5/74
Domestic Patent References:
| JP11119839A | ||||
| JP2010029023A | ||||
| JP2009131064A | ||||
| JP2004248377A | ||||
| JP2006081294A |
Attorney, Agent or Firm:
Fuyuki Nagai