Title:
有機物のための圧力ゲージ
Document Type and Number:
Japanese Patent JP5284961
Kind Code:
B2
Abstract:
A vacuum gauge of the Pirani type for measuring the pressure of vaporized organic or inorganic material used in forming a layer of a device, comprising: an extended filament having a thickness of 5 microns or less and having a temperature coefficient of resistance greater than 0.0035/° C., the filament being subject to the vaporized organic or inorganic material; means for applying a current to the filament so that the temperature of the filament is less than 650° C. so as not to degrade the molecular structure of the organic material; and a structure responsive to a change in resistance or a change in current to determine heat loss from the filament, which is a function of the pressure of the vaporized organic or inorganic material.
Inventors:
Long, michael
Application Number:
JP2009526627A
Publication Date:
September 11, 2013
Filing Date:
August 20, 2007
Export Citation:
Assignee:
Global OLED Technology Limited Liability Company
International Classes:
G01L21/12
Domestic Patent References:
| JP5281073A | ||||
| JP2002030419A | ||||
| JP2002270137A | ||||
| JP7120339A | ||||
| JP63078230U |
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Yoshihiro Kobayashi
Satoshi Deno
Atsushi Ebiya
Tomohiro Minamiyama
Takashi Ishida
Tetsuji Koga
Yoshihiro Kobayashi
Satoshi Deno
Atsushi Ebiya
Tomohiro Minamiyama