Title:
圧力センサ
Document Type and Number:
Japanese Patent JP7372062
Kind Code:
B2
Abstract:
A pressure sensor includes a movable electrode formed in a movable region of a diaphragm, and a fixed electrode formed opposite to the movable electrode. A pressure receiving surface of the diaphragm is held in an inactive state. The inactive pressure receiving surface of the diaphragm is in a state in which molecules of gas to be measured are hard to absorb onto the pressure receiving surface. The pressure receiving surface of the diaphragm can be made inactive by predetermined surface treatment. A layer for making the pressure receiving surface of the diaphragm inactive is formed by the surface treatment, and the pressure receiving surface of the diaphragm is held inactive with the presence of the layer.
Inventors:
Masaru Soeda
Takuya Ishihara
Masashi Sekine
Takuya Ishihara
Masashi Sekine
Application Number:
JP2019123534A
Publication Date:
October 31, 2023
Filing Date:
July 02, 2019
Export Citation:
Assignee:
Azbil Corporation
International Classes:
G01L7/08; G01L9/00
Domestic Patent References:
| JP2006529027A | ||||
| JP2007532871A | ||||
| JP2011002393A | ||||
| JP2013520118A | ||||
| JP2015184064A | ||||
| JP2014515181A | ||||
| JP2013500461A |
Foreign References:
| US20130270511 | ||||
| US20160370242 |
Attorney, Agent or Firm:
Shigeki Yamakawa
Masaki Yamakawa
Masaki Yamakawa
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