Title:
圧力センサ
Document Type and Number:
Japanese Patent JP7440290
Kind Code:
B2
Abstract:
To provide a pressure sensor that has high pressure resistance performance, small measurement error by suppressing hysteresis with respect to pressure, and high sensitivity and high productivity, a pressure sensor includes a diaphragm unit with a first main surface that receives a measurement target fluid's pressure and a second main surface located on the opposite side of this first main surface, a housing, and a sensing unit that outputs the diaphragm unit's deformation as an electric signal, in which at least part of the diaphragm unit has a multi-layer structure in which a plurality of thin plate members are stacked, and the plurality of thin plate members are deformed independently of each other while at least part of the plurality of thin plate members is in press-contact to each other in a pressure receiving state in which the measurement target fluid's pressure is applied to the first main surface.
More Like This:
| JPS5377559 | DETECTOR FOR RATE OR VELOCITY OF FLOW OF FLUID |
| JPH09138177 | PRESSURE RECEPTION DIAPHRAGM |
Inventors:
Yuki Seto
Rina Ogasawara
Yusuke Niimura
Rina Ogasawara
Yusuke Niimura
Application Number:
JP2020026177A
Publication Date:
February 28, 2024
Filing Date:
February 19, 2020
Export Citation:
Assignee:
Azbil Corporation
International Classes:
G01L7/08; G01L9/00
Domestic Patent References:
| JP2017120214A | ||||
| JP2212727A | ||||
| JP59000930U |
Foreign References:
| US20120277593 |
Attorney, Agent or Firm:
Shigeki Yamakawa
Masaki Yamakawa
Masaki Yamakawa
Previous Patent: Electronics
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