Title:
プリズム
Document Type and Number:
Japanese Patent JP4604069
Kind Code:
B2
Abstract:
An alignment system uses a self-referencing interferometer that produces two overlapping and relatively rotated images of an alignment marker. Detectors detect intensities in a pupil plane where Fourier transforms of the images are caused to interfere. The positional information is derived from the phase difference between diffraction orders of the two images which manifests as intensity variations in the interfered orders. Asymmetry can also be measured by measuring intensities at two positions either side of a diffraction order.
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Inventors:
Ally Jeffrey Den Buff
Marten hogelland
Bogslow
Marten hogelland
Bogslow
Application Number:
JP2007185484A
Publication Date:
December 22, 2010
Filing Date:
July 17, 2007
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
G01B9/02; G02B5/04; G01B11/00; G03F7/20; G03F9/00; H01L21/027
Domestic Patent References:
| JP2001358068A |
Attorney, Agent or Firm:
Sakaki Morishita