Title:
A probe card and an inspection device
Document Type and Number:
Japanese Patent JP5947647
Kind Code:
B2
Abstract:
Provided is a probe card capable of effectively placing electronic parts. A probe card according to the present invention includes a plurality of probes that come into contact with a plurality of electrodes of a device, a probe board including the plurality of probes provided thereon, a wiring board that is placed facing a surface of the probe board opposite to a surface including the probes provided thereon, a connector that includes a connection pin and a holder, in which the connection pin electrically connects a line of the probe board and a line of the wiring board, and the holder holds the connection pin between the probe board and the wiring board, and a first electronic part that is mounted on a probe board side surface of the wiring board and placed in a mounting space formed by a through hole or a recess provided in the holder.
Inventors:
Katsushi Mikuni
Kikuchi Yoshinori
Yoshito Onuma
Toshiyuki Kudo
Kikuchi Yoshinori
Yoshito Onuma
Toshiyuki Kudo
Application Number:
JP2012165041A
Publication Date:
July 06, 2016
Filing Date:
July 25, 2012
Export Citation:
Assignee:
Nippon Micronics Co., Ltd.
International Classes:
G01R1/073; G01R1/067; G01R31/26; G01R31/28; H01L21/66
Domestic Patent References:
| JP201043874A | ||||
| JP2009030978A | ||||
| JP2003297887A | ||||
| JP2008145238A |
Foreign References:
| US20080061808 |
Attorney, Agent or Firm:
Ken Ieiri