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Title:
A probe card and an inspection device
Document Type and Number:
Japanese Patent JP6120479
Kind Code:
B2
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Inventors:
Hidehiro Kiyoto
Takashi Kono
Application Number:
JP2011241484A
Publication Date:
April 26, 2017
Filing Date:
November 02, 2011
Export Citation:
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Assignee:
Nippon Micronics Co., Ltd.
International Classes:
G01R1/073; G01R31/26; H01L21/66
Domestic Patent References:
JP2010267913A
JP2010271160A
JP2009176724A
JP2011210515A
Foreign References:
WO2008059767A1
US20090002001
Attorney, Agent or Firm:
Yoshida Rintaro
Yusuke Wakabayashi



 
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