Title:
固体撮像素子の検査用プローブカード
Document Type and Number:
Japanese Patent JP4673280
Kind Code:
B2
Abstract:
The present invention is provided to quickly and efficiently inspect a plurality of CCD sensors. In the present invention, a plurality of openings is formed in a circuit board of a probe card. A plurality of vertical-type probe pins is connected to a lower surface of the circuit board. A guide board is installed at the lower surface of the circuit board, and respective probe pins are inserted into respective guide holes of the guide board. The guide board is made of a transparent glass board. During an inspection, inspection light emitted from a test head passes through the openings of the circuit board and the guide board, so that it is irradiated onto the plurality of CCD sensors on the substrate. Since the plurality of probe pins can be arranged at a narrow pitch without blocking the inspection light, adjacent CCD sensors on the substrate can be inspected simultaneously.
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Inventors:
Kiyoshi Takekoshi
Application Number:
JP2006303997A
Publication Date:
April 20, 2011
Filing Date:
November 09, 2006
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G01R1/073; G01R31/26; H01L21/66; H01L27/14
Domestic Patent References:
| JP10173014A | ||||
| JP2004085261A | ||||
| JP2004266250A |
Attorney, Agent or Firm:
Tetsuo Kanamoto
Miaki Kametani
Koji Hagiwara
Miaki Kametani
Koji Hagiwara