Title:
加工装置
Document Type and Number:
Japanese Patent JP7370286
Kind Code:
B2
Abstract:
To provide a processing device in which a space-saving shutter improves sealing ability than ever before.SOLUTION: A processing device comprises a processing area 3 processing a processed material, a partition plate screening the processing area 3, and a shutter 10 formed on the partition plate. The shutter 10 includes an opening 12-1 through which the processed material passes, a plate 13 fitting the opening 12-1, and a lifting-and-lowering unit 14 lifting and lowering the plate 13. A pair of lateral sides facing each other of each of the opening 12-1 and the plate 13 tilt so that bottom sides 12-5, 13-5 of the opening 12-1 and the plate 13 can be larger than upper sides 12-2, 13-2.SELECTED DRAWING: Figure 3
Inventors:
Paul Vincent Attendido
Application Number:
JP2020045355A
Publication Date:
October 27, 2023
Filing Date:
March 16, 2020
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
E06B9/02; H01L21/677
Domestic Patent References:
| JP202031194A | ||||
| JP6019668U | ||||
| JP58123293U |
Foreign References:
| US20150194325 |
Attorney, Agent or Firm:
Sakai International Patent Office