Title:
加工装置
Document Type and Number:
Japanese Patent JP7446677
Kind Code:
B2
Abstract:
In general, provided is a processing apparatus that monitors the pressure in an exhaust duct of the processing apparatus and does not issue an alarm about a temporary decrease in the magnitude of negative pressure in the exhaust duct. The present invention relates to a processing apparatus for processing a work piece with a processing unit having a spindle while supplying processing water to the work piece held by a chuck table. According to the present invention, the processing apparatus comprises: a processing chamber for covering a part of the chuck table and the processing unit; and an exhaust duct connected to the processing chamber. The exhaust duct includes: an exhaust path having one end connected to the processing chamber and the other end connected to an exhaust unit having a suction source; and a box body communicating with the exhaust path through an opening part formed in a side surface of the exhaust duct and having a pressure sensor therein. The opening part has a size that can reduce the impact of a sudden change in the pressure of the exhaust path on the box body.
Inventors:
Tetsuo Kubo
Application Number:
JP2020037099A
Publication Date:
March 11, 2024
Filing Date:
March 04, 2020
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B55/06; B23Q11/00; B23Q17/00; B24B7/04; H01L21/301; H01L21/304
Domestic Patent References:
| JP2016198838A | ||||
| JP2006194680A | ||||
| JP59079135A |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
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