Title:
プラズマ処理装置および当該装置を用いたＳＯＩウエハの加工方法
Document Type and Number:
Japanese Patent JP6433202
Kind Code:
B2
Inventors:
Yasuhisa Sano
Hiroyasu Takei
Kurio Ken
Hiroyasu Takei
Kurio Ken
Application Number:
JP2014176601A
Publication Date:
December 05, 2018
Filing Date:
August 29, 2014
Export Citation:
Assignee:
National University Corporation Osaka University
International Classes:
H05H1/24; C23C16/509; C23C16/52; H01L21/31; H01L21/316; H05H1/46
Domestic Patent References:
| JP2003059909A | ||||
| JP7169745A | ||||
| JP8225946A | ||||
| JP6124898A | ||||
| JP2009043673A | ||||
| JP2008541367A | ||||
| JP2005111293A | ||||
| JP2013098177A | ||||
| JP2011060737A |
Attorney, Agent or Firm:
Takao Yanagino
Norio Morioka
Hisayoshi Sekiguchi
Masato Nakagawa
Norio Morioka
Hisayoshi Sekiguchi
Masato Nakagawa