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Title:
Processing method of synthetic quartz glass substrate with mirror surface and sensing method of synthetic quartz glass substrate
Document Type and Number:
Japanese Patent JP6323364
Kind Code:
B2
Abstract:
A synthetic quartz glass substrate having front and back surfaces is worked by lapping, etching, mirror polishing, and cleaning steps for thereby polishing the front surface of the substrate to a mirror-like surface. The etching step is carried out using a hydrofluoric acid solution at pH 4-7.

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Inventors:
Shuhei Ueda
Masaki Takeuchi
Application Number:
JP2015036504A
Publication Date:
May 16, 2018
Filing Date:
February 26, 2015
Export Citation:
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Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
C03C15/00; B08B3/08; B08B3/12; B24B1/00; C03C19/00
Domestic Patent References:
JP2005263569A
JP2002323751A
JP2006232624A
JP2002187736A
JP2000330263A
JP10041236A
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Katsuhiko Masaki



 
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