Title:
A processing object adhesion inhibition method, a processing object adhesion inhibition mechanism, and a disk type processing unit
Document Type and Number:
Japanese Patent JP6155127
Kind Code:
B2
Inventors:
Hiroyuki Nakazono
Kensuke Ando
Yasuhiro Araki
Eiichi Miura
Kensuke Ando
Yasuhiro Araki
Eiichi Miura
Application Number:
JP2013154889A
Publication Date:
June 28, 2017
Filing Date:
July 25, 2013
Export Citation:
Assignee:
Mitsubishi Materials Techno Co., Ltd.
International Classes:
F26B17/28; F26B25/04
Domestic Patent References:
JP2002250590A | ||||
JP2003225518A | ||||
JP2002250589A | ||||
JP2002250588A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Hiroshi Masui
Fumihiro Hosokawa
Tadashi Takahashi
Hiroshi Masui
Fumihiro Hosokawa