A processing unit of fault fluoride, and a disposal method of fault fluoride

Japanese Patent JP6085203

B2

The invention provides an apparatus for treating perfluorocompounds as a pretreatment preventing large volume water use and capable of removing solid component in the perfluorocompounds; and filters cannot be blocked. The apparatus (2) for treating perfluorocompounds is characterized by comprising a pretreating device (21) conducting pretreatment for discharged air in an inlet of the apparatus, a heating unit (a first heater (221), a second heater (222))heating discharged air and water in the inlet and hydrolyzing perfluorocompounds via catalysts to generate resolving air containing acid air, a heat exchanger (231) on the front and back segments of the heating unit and conducting heat exchange between the discharged air and water in the inlet of the apparatus and the resovling air and an acid-component removing device (232) removing acid components in a dry way, wherein the pretreatment device (21) is provided with an inlet heater (211) heating the discharged air in the inlet of the apparatus and steamizing water containing liquid in the discharging air in the inlet of the apparatus and filters (212, 212a) removing solid components of the discharged air in the inlet of the apparatus.

Torisu Junichi
Yuji Hayasaka
Kenichi Kato

JP2013057383A

February 22, 2017

March 19, 2013

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SHOWA DENKO K.K.

B01D53/68; B01D53/86; C01B17/45; H01L21/3065

JP2005319401A
JP2008246485A
JP2011115795A
JP2004223302A

Jiro Kobe
Takeshi Senda
Kato Sasaya

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