Title:
A processing unit and a generation method of activated species
Document Type and Number:
Japanese Patent JP6247087
Kind Code:
B2
Abstract:
A processing apparatus includes: a first active species generation unit including a first generation chamber where first active species are generated from a first gas by using silent discharge; a second active species generation unit including a second generation chamber where second active species are generated from a second gas by using at least one of inductively coupled plasma, capacitively coupled plasma and microwave plasma, the second active species generation unit being located downstream from the first active species generation unit and the first active species being supplied from the first generation chamber to the second generation chamber; and a processing chamber where a process is performed on an object to be processed by using the first and second active species supplied from the second generation chamber, the processing chamber being located downstream from the second active species generation unit.
Inventors:
Kazuhide Hasebe
Ryo Shimizu
Ryo Shimizu
Application Number:
JP2013261157A
Publication Date:
December 13, 2017
Filing Date:
December 18, 2013
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/31; H01L21/318; H05H1/46
Domestic Patent References:
| JP2013501384A | ||||
| JP2011154973A | ||||
| JP8279495A | ||||
| JP2010225792A |
Foreign References:
| WO2010082561A1 | ||||
| US20110034035 |
Attorney, Agent or Firm:
Hiroshi Takayama