PROCESSING APPARATUS FOR HYDROGEN-CONTAINING EXHAUST GAS

Title:

PROCESSING APPARATUS FOR HYDROGEN-CONTAINING EXHAUST GAS

Document Type and Number:

Japanese Patent JP2017001024

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide a processing apparatus for a hydrogen-containing exhaust gas.SOLUTION: A processing apparatus 200 for a hydrogen-containing exhaust gas comprises processing portions 210, 250 where a hydrogen-containing exhaust gas inflow pipe 110 into which a hydrogen-containing exhaust gas HG generated in a semiconductor surface modification process flows and an oxygen-containing air inflow pipe 231 into which oxygen-containing air A flows are connected to at least one side and a plurality of catalyst carrier portions 216, 256 containing a catalyst causing a catalytic reaction with the hydrogen-containing exhaust gas HG are included.SELECTED DRAWING: Figure 2

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Inventors:

PARK SANG KWON

Application Number:

JP2016110389A

Publication Date:

January 05, 2017

Filing Date:

June 01, 2016

Export Citation:

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Assignee:

TERA SEMICON CORP

International Classes:

B01D53/86; B01J35/04; F01N3/20

Attorney, Agent or Firm:

Hatta International Patent Corporation

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