Title:
ROLL FOR TRANSPORTING AND COOLING LONG SIZED FILM AND PROCESSING DEVICE HAVING THE ROLL
Document Type and Number:
Japanese Patent JP2016117938
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a roll for transporting and cooling a long sized film including a gas introduction mechanism in a low cost structure which is easily created.SOLUTION: In a can roll 56 which is cooled by rolling a long sized film F transporting by a roll-to-roll in a vacuum chamber 51, a region where the long sized film F is rolled, in an outer circumference face 100a of a cylindrical member 100 for composing the can roll 56, is made rough by sand blast etc. so that a great number of gas flow paths connected in the outer circumference face 100a direction is formed, for example, an arithmetic average roughness Ra becomes 0.5 to 10 μm, and a plurality of gas supply paths 103 is provided for connecting to at least one end in a center axis 111 direction of the cylindrical member 100 in a region 102 which is made rough, the gas supply paths 103 extending to the center axis 111 direction.SELECTED DRAWING: Figure 2
Inventors:
KANDA EIZABURO
Application Number:
JP2014259554A
Publication Date:
June 30, 2016
Filing Date:
December 23, 2014
Export Citation:
Assignee:
SUMITOMO METAL MINING CO
International Classes:
C23C14/56; C23C16/44; C23C16/54
Domestic Patent References:
| JP2000509101A | 2000-07-18 | |||
| JPH0222470A | 1990-01-25 | |||
| JPS6050625A | 1985-03-20 | |||
| JP2001140079A | 2001-05-22 | |||
| JP2003321775A | 2003-11-14 | |||
| JP2014122394A | 2014-07-03 | |||
| JPS61289533A | 1986-12-19 |
Attorney, Agent or Firm:
Noriyuki Tsujikawa
Masao Yamamoto
Masao Yamamoto