Title:
基板の処理装置
Document Type and Number:
Japanese Patent JP5058722
Kind Code:
B2
Inventors:
Akao Norio
Daisuke Ishikawa
Ueki Shinsuke
Daisuke Ishikawa
Ueki Shinsuke
Application Number:
JP2007229391A
Publication Date:
October 24, 2012
Filing Date:
September 04, 2007
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
F26B15/12; H01L21/304
Domestic Patent References:
| JP2006245125A | ||||
| JP10158866A | ||||
| JP2001213157A | ||||
| JP2000111252A |
Attorney, Agent or Firm:
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto