Title:
処理装置及びテーブル移動装置
Document Type and Number:
Japanese Patent JP6598731
Kind Code:
B2
Inventors:
Jun Okamoto
Application Number:
JP2016097829A
Publication Date:
October 30, 2019
Filing Date:
May 16, 2016
Export Citation:
Assignee:
towa corporation
International Classes:
B23Q11/08; F16J3/04; G12B5/00
Domestic Patent References:
JP11347948A | ||||
JP2011224729A | ||||
JP57180468U | ||||
JP63180782A | ||||
JP59105341U | ||||
JP2014079851A | ||||
JP3196939A |
Foreign References:
CN104526453A |