Moターゲット材の製造方法 - Hitachi Metals Co., Ltd.

Title:

Moターゲット材の製造方法

Document Type and Number:

Japanese Patent JP4591749

Kind Code:

B2

More Like This:

WO/2014/098200	SUBSTRATE HOLDER AND PRODUCTION METHOD FOR SUBSTRATE HAVING FILM FORMED OVER ENTIRE SURFACE THEREOF USING SAME
WO/2020/244781	DEPOSITION SOURCE, DEPOSITION APPARATUS AND METHOD OF DEPOSITING MATERIAL ON A SUBSTRATE
WO/2021/112004	AG ALLOY SPUTTERING TARGET

Inventors:

Katsunori Iwasaki
Keisuke Inoue
Kazuya Saito
Norio Uemura

Application Number:

JP2004121954A

Publication Date:

December 01, 2010

Filing Date:

April 16, 2004

Export Citation:

Assignee:

Hitachi Metals Co., Ltd.

International Classes:

C23C14/34

Domestic Patent References:

Previous Patent: 希土類焼結磁石の製造方法及び製造装置

Next Patent: 車両の乗員保護装置