Title:
フッ化カルシウム結晶の製造方法および原料の処理方法
Document Type and Number:
Japanese Patent JP4154744
Kind Code:
B2
Abstract:
A manufacturing method for a single crystal of calcium fluoride includes the steps of degassing calcium fluoride powder particles to desorb impurities from surfaces of the calcium fluoride powder particles, preprocessing the degassed calcium fluoride powder particles by fusing the degassed calcium fluoride powder particles in a crucible to obtain a preprocessed product, and re-fusing the preprocessed product in a crucible to grow a single crystal of calcium fluoride.
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Inventors:
Kazuo Kimura
Shuichi Takano
Tsutomu Mizugaki
Shuichi Takano
Tsutomu Mizugaki
Application Number:
JP33066997A
Publication Date:
September 24, 2008
Filing Date:
December 01, 1997
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
C30B11/00; F26B5/04; B01J6/00; B01J19/00; C01F11/22; C30B29/12
Domestic Patent References:
| JP11228292A | ||||
| JP10330192A | ||||
| JP4349199A | ||||
| JP64069600A | ||||
| JP4154686A |