Title:
引出電極の作製方法
Document Type and Number:
Japanese Patent JP4190704
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method capable of highly accurately manufacturing a superfine extraction electrode. SOLUTION: Press working is performed on metallic foil 11 by a load 294N by a first stage punch 5 and a first stage die 3 by controlling a pressurizing part 7. As a result, a semispherical shell-like first stage projection 12 having a diameter of 0.89 mm and the height not less than 0.1 mm is formed on the metallic foil 11 as shown in a drawing 3(c). Next, a holder 6 is removed from the pressurizing part 7, and instead of it, a holder for holding a second stage punch 8 is installed in the pressurizing part 7. Press working is performed on a tip part of the first stage projection 12 by a load 21.6N by the second stage punch 8 and a second stage die 4 by controlling the pressurizing part 7. As a result, a second stage projection 13 having a diameter of 0.203 mm and the height not less than 0.07 mm is formed on the tip of the first stage projection 12 as shown in a drawing 3(e). A focusing ion beam is irradiated to a top part of the second stage projection 13, and a through hole is opened.
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Inventors:
Kazushi Yamanaka
Osamu Nishikawa
Masashi Iwatsuki
Osamu Nishikawa
Masashi Iwatsuki
Application Number:
JP2000171388A
Publication Date:
December 03, 2008
Filing Date:
June 08, 2000
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
B23P13/00; B21D22/04; B21D33/00; G01Q70/16; H01J49/16
Domestic Patent References:
| JP1166650A |